JPH047448B2 - - Google Patents

Info

Publication number
JPH047448B2
JPH047448B2 JP58115871A JP11587183A JPH047448B2 JP H047448 B2 JPH047448 B2 JP H047448B2 JP 58115871 A JP58115871 A JP 58115871A JP 11587183 A JP11587183 A JP 11587183A JP H047448 B2 JPH047448 B2 JP H047448B2
Authority
JP
Japan
Prior art keywords
wire
circuit
planar
inspection
image memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58115871A
Other languages
English (en)
Japanese (ja)
Other versions
JPS608706A (ja
Inventor
Hiroyuki Tsukahara
Masahito Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58115871A priority Critical patent/JPS608706A/ja
Publication of JPS608706A publication Critical patent/JPS608706A/ja
Publication of JPH047448B2 publication Critical patent/JPH047448B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/859Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector involving monitoring, e.g. feedback loop

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Supply And Installment Of Electrical Components (AREA)
JP58115871A 1983-06-29 1983-06-29 ボンディングワイヤ形状検査装置 Granted JPS608706A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58115871A JPS608706A (ja) 1983-06-29 1983-06-29 ボンディングワイヤ形状検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58115871A JPS608706A (ja) 1983-06-29 1983-06-29 ボンディングワイヤ形状検査装置

Publications (2)

Publication Number Publication Date
JPS608706A JPS608706A (ja) 1985-01-17
JPH047448B2 true JPH047448B2 (en]) 1992-02-12

Family

ID=14673217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58115871A Granted JPS608706A (ja) 1983-06-29 1983-06-29 ボンディングワイヤ形状検査装置

Country Status (1)

Country Link
JP (1) JPS608706A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102457676A (zh) * 2010-10-29 2012-05-16 华晶科技股份有限公司 影像处理方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61277005A (ja) * 1985-05-31 1986-12-08 Nippon Denso Co Ltd チップ部品の実装検査装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52133241A (en) * 1976-04-30 1977-11-08 Hitachi Shipbuilding Eng Co Shape detecting apparatus
JPS5537982A (en) * 1978-09-11 1980-03-17 Ishikawajima Harima Heavy Ind Co Ltd Solid-shape detector for characteristic test of deformation of curved-surface body
JPS5662508U (en]) * 1979-10-22 1981-05-27
JPS57149905A (en) * 1981-03-11 1982-09-16 Fujitsu Ltd Pattern inspecting device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102457676A (zh) * 2010-10-29 2012-05-16 华晶科技股份有限公司 影像处理方法

Also Published As

Publication number Publication date
JPS608706A (ja) 1985-01-17

Similar Documents

Publication Publication Date Title
KR930005496B1 (ko) 와이어본딩 검사장치
JP2851151B2 (ja) ワイヤボンディング検査装置
JPH11163047A (ja) 半導体装置の製造方法及びその装置
JPH11316112A (ja) 集積回路の交差光軸検査システム
JPH047448B2 (en])
JPH033941B2 (en])
JPH0441497B2 (en])
JP3865156B2 (ja) 画像比較装置およびこれを用いたウエハ検査装置とウエハ検査システム
JPH04315905A (ja) 物体検査装置
JPS6049212A (ja) 線状物体検査装置
JPH0257905A (ja) Jリードicパッケージのリード平坦度検出機
KR950010190B1 (ko) 전자부품 검사장치
JPS58115700A (ja) 画像処理装置の自己診断方法
JP3398754B2 (ja) 集積回路チップ浮き上がり検査装置
JPH05288687A (ja) リード検査装置
JPS62274205A (ja) リ−ド平坦度検査方法および装置
JPS6239822B2 (en])
JPH01140048A (ja) 物体形状の検査方法
JP3029723B2 (ja) 半田付け工程でのリード浮きの検出方法
JPH03154173A (ja) 不良品判定画像処理装置
JP3341382B2 (ja) 半導体装置の外観検査装置
JPH0578176B2 (en])
JPS63154949A (ja) 基板アセンブリ検査装置
JPH0524667B2 (en])
JPS6295409A (ja) 外観検査装置